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Function Control Method for GaN Heteroepitaxy by HVPE
DU Yanhao,LUO Weike,WU Jiejun,John Goldsmith,HAN Tong,YANG Zhijian,YU Tongjun,ZHANG Guoyi
Acta Scientiarum Naturalium Universitatis Pekinensis
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High Surface Hole Concentration P-type GaN Using Mg Implantation
LONG Tao,YANG Zhijian,ZHANG Guoyi
Acta Scientiarum Naturalium Universitatis Pekinensis
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Mg ions were implanted on Mg-doped GaN grown by metalorganic chemical vapor deposition(MOCVD). The p-type GaN was achieved with high hole concentration(8.28×10
17
cm
-3
)conformed by Van der pauw Hall measurement after annealing at 800℃ for 1h. This is the first experimental report of Mg implantation on Mg-doped GaN and achieving p-type GaN with high surface hole concentration.
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